Sophisticated, Trusted Loader for Handling a Variety of Wafers
The NWL Series is a superb line-up of semiconductor wafer loaders from Nikon capable of transferring 6″ (150mm) and 8″ (200mm) diameter wafers down to a thickness of 100 microns (option) onto Nikon Eclipse L200N and LV150N microscopes or a NEXIV VMZ-S video measuring system.
Integration with NEXIV – Video Metrology
The NWL200 wafer loader integrated alongside a Nikon NEXIV video measuring system provides high precision, accuracy and speed for semiconductor inspection in a production environment.
Product Highlights
High Reliability in Semiconductor Production
When the power supply is interrupted unexpectedly, the vacuum chuck of the macro arm remains active, allowing safe wafer removal.
Macro Inspection Functions
Semiconductor wafer front side pattern, back periphery and centre area inspection is supported. The wafer rotation speed and tilt angle are set automatically or manually.
Designed for Maximum Throughput
A fast wafer cassette elevator with a non-contact centring mechanism allows rapid, accurate wafer alignment using a multi-arm system for loading and unloading wafers with the highest precision.
Ergonomic Design
The NWL200 is designed ergonomically for easy of operation and control.
Positioned at 35 degrees to the left, wafer in-slot location and full cassette exchange is easy.
